Nanoelectrochemical Sensors on CMOS

Abstract

The proposed supplemental funding research will facilitate realization of nanoelectrochemical systems through a marriage of microelectronics and electrochemistry for low-cost, high-throughput bench-top nanofabrication. The investigators propose a highly unconventional yet powerful candidate to realize such nanoelectrochemical device, that of top-down fabricated silicon CMOS (Complementary Metal Oxide Semiconductor) die as functional substrate for controlled assembly of already synthesized nanostructures. This new paradigm extends the role of CMOS technology beyond conventional areas of computation, signal processing and communication towards directed nanoassembly. The investigators plan to demonstrate an integrated chemical sensor array on CMOS based on carbon nanotubes, graphene and metal oxide nano wires.

Report

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